Facility Requirements

Power: 208V / 3 Phase / 70 A

Cooling Water: 3.0 gpm / 18-25 C / 20-40 psi

Gases(minimum grade 6): Argon (Ar) / Hydrogen (H2) / Methane (CH4) / Oxygen (O2) (optional) / Nitrogen (N2) (optional)

Gas Cabinet and Abatement: User supplied

Diamond Deposition System