Features & Benefits

Toroidal Plasma Geometry with Compact 400 kHz Power Source

  • No magnetron tube to be replaced
  • Highly efficient power generation
  • 90% ac power to plasma conversion efficiency

Up to 12kW Plasma Power

  • High deposition rates

Integrated Control System

  • No user tuning or power setting required

No Quartz Components

  • Reduced contamination

Sample Stage Motion

  • Position of growing surface can be optimized and non-growing surfaces shielded

All Samples Equal Distance From Plasma

  • Higher sample to sample consistency

Independent Control of Sample Temperature

  • Greater degree of control over growth conditions

Process Chamber Easily Removed

  • Flexibility in cleaning, configuration, upgrades

All Control Functions Available on Local Operator Interface or Remote

  • Flexibility in system operation